Precision Positioning Stage PPS-20LM
Key features
|
- Description
- Specifications
- Documentation & Part No.
The PPS-20 Linear Motor version is suitable for applications requiring very fast speeds. Miniature crossed roller bearings assure high stiffness and guiding accuracy for loads up to 20 N (horizontal orientation). The PPS-20LM is available with either an analog or digital encoder. Closed loop resolution of 2 nm is achievable. The PPS-20LM is compatible with the MMC-300 controller.
Travel range [mm] | 11 | 18 | 25 |
Straightness/Flatness [µm] | ± 1 | ± 1.5 | ± 1.5 |
Pitch [µrad] | ± 60 | ± 80 | ± 80 |
Yaw [µrad] | ± 70 | ± 90 | ± 90 |
Motor option | Voice Coil Linear Motor |
Speed, max [mm/s] | 100 |
Encoder option | Analog (1vpp) | Digital (RS-422) |
Resolution, typical [nm] | 10 | 2 |
Repeatability, bi-directional [µm] | ± 0.05 | ± 0.02 |
Repeatability, uni-directional [µm] | 0.05 | 0.02 |
Accuracy [µm] | ± 1 | ± 1 |
Orientation | Fx [N] | Fy [N] | Fz [N] | Mx [N·m] | My [N·m] | Mz [N·m] |
Load, max | 1 | 20 | 20 | 0.7 | 0.7 | 0.7 |
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