MICRONIX USA - Positioners-Linear Motion

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Products & Solutions POSITIONERSLinear Motion

LINEAR MOTION

Stepper Motor
Linear Motor
Actuators

	Translation Stage VT-21S Travel: 10 mm Load, max: 1 kg Speed, max: 5 mm/s Resolution, typical: 0.05 μm Repeatability, bi-directional: ± 0.2 μm Repeatability, uni-directional: 0.2 μm Encoder Options: Analog, Digital
	Translation Stage VT-21L Travel: 26 mm Load, max: 1 kg Speed, max: 5 mm/s Resolution, typical: 0.05 μm Repeatability, bi-directional: ± 0.2 μm Repeatability, uni-directional: 0.2 μm Encoder Options: Analog, Digital
	Precision Positioning Stage PPS-20SM Travel: 12 - 51 mm Load, max: 2 kg Speed, max: 4 mm/s Resolution, typical: 0.05 μm Repeatability, bi-directional: ± 0.2 μm Repeatability, uni-directional: 0.2 μm Encoder Options: Analog, Digital
	Precision Positioning Stage PPS-28SM Travel: 26 - 102 mm Load, max: 5 kg Speed, max: 4 mm/s Resolution, typical: 0.05 μm Repeatability, bi-directional: ± 0.2 μm Repeatability, uni-directional: 0.2 μm Encoder Options: Analog, Digital
	Translation Stage VT-50L Travel: 50 - 300mm Load, max: 20kg Speed, max: 5 mm/s Resolution, typical: 0.05 µm Repeatability, bi-directional: ±0.2 µm Repeatability, uni-directional: 0.2 µm Encoder Options: Analog, Digital
	Precision Positioning Stage PPS-60SM Travel: 25 - 300 mm Load, max: 15 kg Speed, max: 5mm/s Resolution, typical: 0.05 μm Repeatability, bi-directional: ± 0.1 μm Repeatability, uni-directional: 0.1 μm Encoder Options: Analog, Digital, Digital Low Cost
	Precision Positioning Stage PPS-110SM Travel: 100 - 1000 mm Load, max: 25 kg Speed, max: 10 mm/s Resolution, typical: 50 nm Repeatability, bi-directional: ± 100 nm Repeatability, uni-directional: 100 nm Encoder Options: Digital
	Elevation Stage ES-50 Travel: 10 mm Load max: 1 kg Speed, max: 5 mm/s Resolution, typical: 0.05 μm Repeatability, bi-directional: ± 0.2 μm Repeatability, uni-directional: 0.2 μm Encoder Options: Analog, Digital
	Elevation Stage PZS-90 Travel range of 35mm 100 nm closed loop resolution Load capacity up to 20kg Steel cross roller bearings Integrated mechanical limit switches Vacuum versions available

	Precision Positioning Stage PPS-20LM Travel: 11, 18, 25mm (other travel lengths available upon request) Load, max: 2 kg Speed, max: 100 mm/s Resolution, typical: 2 nm Repeatability, bi-directional: ± 20 nm Repeatability, uni-directional: 20 nm Encoder Options: Analog, Digital
	Precision Positioning Stage PPS-28LM Travel: 26 - 102mm Load, max: 5 kg Speed, max: 100 mm/s Resolution, typical: 2 nm Repeatability, bi-directional: ± 20 nm Repeatability, uni-directional: 20 nm Encoder Options: Analog, Digital
	Precision Positioning Stage PPS-60LM Travel: 25 - 300 mm Load, max: 15 kg Speed, max: 100 mm/s Resolution, typical: 0.002 μm Repeatability, bi-directional: ± 0.20 μm Repeatability, uni-directional: 0.02 μm Encoder Options: Analog, Digital, Digital Low Cost
	Precision Positioning Stage PPS-110LM Travel: 100 - 1000 mm Load, max: 25 kg Speed, max: 250 mm/s Resolution, typical: 2 nm Repeatability, bi-directional: ± 20 nm Repeatability, uni-directional: 20 nm Encoder Options: Digital

	Micro Pusher MP-21 Travel: 12, 25 mm Force, max: 20 N Speed, max: 5 mm/s Resolution, typical: 0.1 μm Repeatability, bi-directional: ± 0.5 μm Repeatability, uni-directional: 0.4 μm Encoder Options: None (open loop only)
	Precision Actuator MPA-20 Travel range of 12mm Gear reduction of 4:1 Load capacity up to 10 kg Force, max: 100N Preloaded spline for low backlash Hermetically sealed limit switches, UHV compatible Integrated thermal couple

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