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6 Degree of Freedom Platform X-BOT-50

Product Highlights

  • Travel Range:
    ±14XY, ±2.5 Z, ±9°Rx, ±10°Ry, Rz 360°
  • Resolution:
    12.5nm
  • Repeatability:
    50nm
  • Load:
    200g
  • Max. Speed:
    5 mm/s ; 10 °/s (MMC-110)
  • Height:
    60mm

Main Image
X-BOT-50-1.jpg

Description


X-BOT-50 is a miniature "hexapod" with 60mm height for positioning and adjustment of precision components in 6 degrees of freedom with nanometer resolution. Full 360° z-rotation can be integrated under the carrier platform. HV and UHV as well as non-magnetic versions are available. Custom travel ranges are available upon request. 


Specifications


Travel Dependent
Tx, Ty Travel Range [mm] ± 14
Tz Travel Range [mm] ± 2.5
Rx Travel Range [deg] ± 9°
Ry Travel Range [deg] ± 10°
Rz Travel Range [deg] 360° (Optional PR-20)
Limit Switch None
Motor Compatibility
Motor Type Piezo Motor
Max. Speed 5 mm/s ; 10 °/s (MMC-110)
Motor/Feedback Dependent Specifications
Encoder Option None (Open Loop) Digital (RS-422) Absolute Optical (BiSS C)
Resolution Tx, Ty, Tz [nm] 1 20 12.5
Resolution Rx, Ry, Rz [µdeg] N/A 50 50
Repeatability Tx, Ty, Tz [nm] N/A 50 50
Repeatability Rx, Ry, Rz [µdeg] N/A 50 50
Load Characteristics
Orientation Fx (N) Fy (N) Fz (N) Mx (N·m) My (N·m) Mz (N·m)
Max. Load 2 2 2 - - -
Operating Conditions
Environmental Options Atmospheric High Vacuum 10-6 mbar Ultra High Vacuum 10-9 mbar Non-Magnetic

Downloads



CAD Files


Product Configurations
3D Preview
CAD
X-BOT-50-11000
Motor Type
Piezo Motor
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
X-BOT-50-11300
Motor Type
Piezo Motor
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
X-BOT-50-11500
Motor Type
Piezo Motor
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
Atmospheric
X-BOT-50-11006
Motor Type
Piezo Motor
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
X-BOT-50-11306
Motor Type
Piezo Motor
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
X-BOT-50-11506
Motor Type
Piezo Motor
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
X-BOT-50-11009
Motor Type
Piezo Motor
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
X-BOT-50-11309
Motor Type
Piezo Motor
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
X-BOT-50-11509
Motor Type
Piezo Motor
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
X-BOT-50-1100M
Motor Type
Piezo Motor
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Non-Magnetic
X-BOT-50-1130M
Motor Type
Piezo Motor
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Non-Magnetic
X-BOT-50-1150M
Motor Type
Piezo Motor
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
Non-Magnetic

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