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Precision Piezo Stage PPS-50

Product Highlights

  • Travel Range:
    26 mm - 100 mm
  • Encoder Resolution:
    1 nm (Closed Loop)
  • Repeatability, bi-directional:
    ± 20 nm
  • Repeatability, uni-directional:
    20 nm
  • Max. Speed:
    5 mm/s (MMC-110)
  • Max. Load:
    3 kg
  • Encoder Options:
    Analog or Digital
  • Height:
    15 mm
  • Bearing Type:
    Crossed Roller Bearing

PPS-50PM
PPS-50PM_v1.2_web_dims-4.jpg

Description


The precision piezo stage PPS-50 allows nanopositioning of high loads. Crossed roller bearings assure high stiffness for loads up to 30N. It is fully integrated with our patented multi-phase piezo motor, and optional high resolution encoder (up to 1 nm resolution).

The PPS-50 can also be combined with our rotary and gonio stages for ultimate motion fexibility.

The PPS-50 is compatible with our MMC-100 and MMC-110 controllers.


Specifications


Travel Dependent
Travel Range 26 mm 50 mm 75 mm 100 mm
Straightness, Flatness (µm) ±2 ±3 ± 4 ± 5.0
Pitch (µrad) N/A
Yaw (µrad) N/A
Weight (g), Open Loop 170 300 400 500
Weight (g), Closed Loop 180 310 410 510
Limit Switch None, Magnetic (Open Loop Only)
Motor Compatibility
Motor Type Piezo Motor
Max. Speed (mm/s) 2 (MMC-100), 5 (MMC-110)
Motor/Feedback Dependent Specifications
Encoder Option None (Open Loop) Digital (RS-422) Absolute Optical (BiSS C)
Typical Resolution (nm) 1 1 10
Repeatability, bi-directional (nm) N/A ± 20 ± 50
Repeatability, uni-directional (nm) N/A 20 50
Load Characteristics
Orientation Fx (N) Fy (N) Fz (N) Mx (N·m) My (N·m) Mz (N·m)
Max. Load 3 10 30 1 1 1
Operating Conditions
Environmental Options Atmospheric Ultra High Vacuum 10-9 mbar High Vacuum 10-6 mbar

Downloads



CAD Files


Product Configurations
3D Preview
CAD
PPS-50-11000
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-50-12000
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-50-13000
Motor Type
Piezo Motor
Travel Range
75 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-50-14000
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-50-11006
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-50-12006
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-50-13006
Motor Type
Piezo Motor
Travel Range
75 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-50-14006
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-50-11009
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-50-12009
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-50-13009
Motor Type
Piezo Motor
Travel Range
75 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-50-14009
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-50-11300
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-50-12300
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-50-13300
Motor Type
Piezo Motor
Travel Range
75 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-50-14300
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-50-11306
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-50-12306
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-50-13306
Motor Type
Piezo Motor
Travel Range
75 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-50-14306
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-50-11309
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-50-12309
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-50-13309
Motor Type
Piezo Motor
Travel Range
75 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-50-14309
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-50-11500
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
Atmospheric
PPS-50-12500
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
Atmospheric
PPS-50-13500
Motor Type
Piezo Motor
Travel Range
75 mm
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
Atmospheric
PPS-50-14500
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
Atmospheric
PPS-50-11506
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-50-12506
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-50-13506
Motor Type
Piezo Motor
Travel Range
75 mm
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-50-14506
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-50-11010
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic (Open Loop Only)
Environmental Options
Atmospheric
PPS-50-12010
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic (Open Loop Only)
Environmental Options
Atmospheric
PPS-50-13010
Motor Type
Piezo Motor
Travel Range
75 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic (Open Loop Only)
Environmental Options
Atmospheric
PPS-50-14010
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic (Open Loop Only)
Environmental Options
Atmospheric
PPS-50-11016
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic (Open Loop Only)
Environmental Options
High Vacuum 10-6 mbar
PPS-50-12016
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic (Open Loop Only)
Environmental Options
High Vacuum 10-6 mbar
PPS-50-13016
Motor Type
Piezo Motor
Travel Range
75 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic (Open Loop Only)
Environmental Options
High Vacuum 10-6 mbar
PPS-50-14016
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic (Open Loop Only)
Environmental Options
High Vacuum 10-6 mbar

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