Elevation Stage ES-50PM

Product Highlights

  • Travel Range:
    10 mm
  • Encoder Resolution:
    2 nm (Closed Loop)
  • Repeatability, bi-directional:
    ± 50 nm
  • Repeatability, uni-directional:
    50 nm
  • Max. Speed:
    > 5 mm/s
  • Max. Load:
    1 kg
  • Encoder Options:
    Analog or Digital
  • Bearing Type:
    Crossed Roller Bearings

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Description


The ES-50PM piezo elevation stage is designed for applications with limited space conditions. The ES-50PM stage is driven by a patented multi-phase piezo motor. Cross roller bearings assure smooth motion and high stiffness. The ES-50PM allows for a highly rigid XZ or XYZ setup without the need for adapter brackets when combined with the PPS-60, VT-50 and PPX-50 series of linear stages. Versions capable of operation in vaccum (10-9 mbar) are available. The ES-50PM is compatible with MMC-100 and MMC-110 controller.


Specifications


Travel Dependent
Travel Range 10 mm
Straightness, Flatness (µm) ± 4.0
Pitch (µrad) ± 300
Yaw (µrad) ± 300
Weight (g) 110
Limit Switch Mechanical, None
Motor Compatibility
Motor Type Piezo Motor
Max. Speed (mm/s) > 1 (MMC-100), > 5 (MMC-110)
Motor/Feedback Dependent Specifications
Encoder Option None (Open Loop) Analog (1 Vpp) Digital (RS-422)
Typical Resolution (nm) 1 10 2
Repeatability, bi-directional (nm) N/A ± 50 ± 50
Repeatability, uni-directional (nm) N/A 50 50
Load Characteristics
Orientation Fx (N) Fy (N) Fz (N) Mx (N·m) My (N·m) Mz (N·m)
Max. Load 5 5 10 1 1 1
Operating Conditions
Environmental Options Atmospheric High Vacuum 10-6 bar High Vacuum 10-9 bar


CAD Files


Product Configurations
3D Preview
CAD
ES-50PM-11000
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
ES-50PM-11006
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
ES-50PM-11009
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar
ES-50PM-11200
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Atmospheric
ES-50PM-11206
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
ES-50PM-11209
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar
ES-50PM-11300
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
ES-50PM-11306
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
ES-50PM-11309
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar
ES-50PM-11010
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
Atmospheric
ES-50PM-11016
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 bar
ES-50PM-11019
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-9 bar
ES-50PM-11210
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
Mechanical
Environmental Options
Atmospheric
ES-50PM-11216
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 bar
ES-50PM-11219
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-9 bar
ES-50PM-11310
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
Digital (RS-422)
Limit Switch
Mechanical
Environmental Options
Atmospheric
ES-50PM-11316
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
Digital (RS-422)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 bar
ES-50PM-11319
Motor Type
Piezo Motor
Travel Range
10 mm
Encoder Option
Digital (RS-422)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-9 bar

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