8 in. travel in X and Y axes, 0.5 in travel in Z-axis, 10° manual rotation and 3.5° manual tip-tilt for thermal chuck. 4 in. travel in Z-axis for probe.
6 degrees of freedom with PPS-20 in a high vacuum environment
XYZ travel with PPX-32 and PPS-20 stages
XYZ travel with PPS-20 stage with non-magnetic option.