Micro Precision Actuator, UHV MPA-20

Product Highlights

  • Travel Range:
    12 mm
  • Typical Resolution:
    0.1 µm
  • Repeatability, bi-directional:
    ± 1 µm
  • Repeatability, uni-directional:
    1 µm
  • Max. Load:
    10 kg
  • Gear Reduction:
  • Switch Type:
    Hermetically sealed limited switches, UHV compatible
  • Bearing Type:
    Preloaded Spline for Low Backlash



The MPA-20 linear actuator is designed for ultra high vacuum (10-9 mbar) environments. Typical applications include actuation of manual drive stages and mirror mounts. It utilizes a 2-phase stepper motor and two hermetically sealed mechanical limit switches. The MPA-20 is is compatible with the MMC-200 controller.

Not recommended for new designs


Travel Dependent
Travel Range 12 mm
Weight (g) 670
Limit Switch Mechanical
Motor Compatibility
Motor Type Internal Stepper Motor
Motor/Feedback Dependent Specifications
Encoder Option None (Open Loop)
Typical Resolution (µm) 0.1
Repeatability, bi-directional (µm) ± 1
Repeatability, uni-directional (µm) 1
Load Characteristics
Orientation Fx (N) Fy (N) Fz (N)
Max. Load 100 10 10
Operating Conditions
Environmental Options Ultra High Vacuum 10-9 mbar

CAD Files

Product Configurations
3D Preview
Motor Type
Internal Stepper Motor
Travel Range
12 mm
Encoder Option
None (Open Loop)
Environmental Options
Ultra High Vacuum 10-9 mbar