Micro Precision Actuator, UHV MPA-20

Product Highlights

  • Travel Range:
    12 mm
  • Typical Resolution:
    0.1 µm
  • Repeatability, bi-directional:
    ± 1 µm
  • Repeatability, uni-directional:
    1 µm
  • Max. Load:
    10 kg
  • Gear Reduction:
    4:1
  • Switch Type:
    Hermetically sealed limited switches, UHV compatible
  • Bearing Type:
    Preloaded Spline for Low Backlash

Zoom_MPA-20.jpg

Description


The MPA-20 linear actuator is designed for ultra high vacuum (10-9 mbar) environments and limited space applications. Typical applications include actuation of manual drive stages and mirror mounts. It utilizes a 2-phase stepper motor and two hermetically sealed mechanical limit switches. The MPA-20 is is compatible with the MMC-200 controller.


Specifications


Travel Dependent
Travel Range 12 mm
Limit Switch Mechanical
Motor Compatibility
Motor Type Stepper Motor
Motor/Feedback Dependent Specifications
Encoder Option None (Open Loop)
Typical Resolution (µm) 0.1
Repeatability, bi-directional (µm) ± 1.0
Repeatability, uni-directional (µm) 1.0
Load Characteristics
Orientation Fx (N) Fy (N) Fz (N)
Max. Load 100 10 10
Operating Conditions
Environmental Options Ultra High Vacuum 10-9 mbar


CAD Files


Product Configurations
3D Preview
CAD
MPA-20-11019
Motor Type
Stepper Motor
Travel Range
12 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
Ultra High Vacuum 10-9 mbar

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