Piezo Positioner Cross Stage PPX-50

Product Highlights

  • Travel Range:
    28 mm x 28 mm
  • Encoder Resolution:
    2 nm (Closed Loop)
  • Repeatability, bi-directional:
    ± 50 nm
  • Repeatability, uni-directional:
    50 nm
  • Max. Speed:
    10 mm/s
  • Max. Load:
    3 kg
  • Encoder Options:
    Analog or Digital
  • Open Aperture:
    Max. 19 x 19 mm / Min. 9.5 x 9.5 mm
  • Height:
    17.5 mm
  • Bearing Type:
    Cross Roller Bearings

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Description


The PPX-50 is a low profile, long travel, integrated XY stage with an open aperture and a height of only 17.5 mm. Cross roller bearings guarantee smooth and stable motion for loads up to 30 N. It utilizes a multi-phase piezo motor resulting in high speed (> 10 mm/s) and high blocking force (> 2 N). The PPX-50 is available in open loop or with a linear encoder with a closed-loop resolution of 2 nm. Versions capable of operation in vacuum (10-9 mbar) are available. The PPX-50 is compatible with the MMC-100 and MMC-110 controllers.


Specifications


Travel Dependent
Travel Range 28 x 28 mm
Straightness, Flatness (µm) ± 3.5
Pitch (µrad) ± 200
Yaw (µrad) ± 100
Weight (g) 120
Limit Switch None
Motor Compatibility
Motor Type Piezo Motor
Max. Speed (mm/s) 2 (MMC-100), 10 (MMC-110)
Motor/Feedback Dependent Specifications
Encoder Option None (Open Loop) Analog (1 Vpp) Digital (RS-422)
Typical Resolution (nm) 1 10 2
Repeatability, bi-directional (nm) N/A ± 50 ± 50
Repeatability, uni-directional (nm) N/A 50 50
Load Characteristics
Orientation Fx (N) Fy (N) Fz (N) Mx (N·m) My (N·m) Mz (N·m)
Max. Load 2 2 30 0.6 0.6 0.6
Operating Conditions
Environmental Options Atmospheric High Vacuum 10-6 bar High Vacuum 10-9 bar


CAD Files


Product Configurations
3D Preview
CAD
PPX-50-11000
Motor Type
Piezo Motor
Travel Range
28 x 28 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPX-50-11006
Motor Type
Piezo Motor
Travel Range
28 x 28 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
PPX-50-11009
Motor Type
Piezo Motor
Travel Range
28 x 28 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar
PPX-50-11200
Motor Type
Piezo Motor
Travel Range
28 x 28 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Atmospheric
PPX-50-11206
Motor Type
Piezo Motor
Travel Range
28 x 28 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
PPX-50-11209
Motor Type
Piezo Motor
Travel Range
28 x 28 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar
PPX-50-11300
Motor Type
Piezo Motor
Travel Range
28 x 28 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPX-50-11306
Motor Type
Piezo Motor
Travel Range
28 x 28 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
PPX-50-11309
Motor Type
Piezo Motor
Travel Range
28 x 28 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar

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