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6 Degree of Freedom Platform X-BOT-120

Product Highlights

  • Travel Range:
    ±6 XY, +3.5/-6 Z, +7°/-9° Rx, ±9° Ry, ±6° Rz
  • Encoder Resolution:
    25 nm
  • Repeatability, bi-directional:
    ± 200 nm
  • Payload:
    500 g (Vertical Orientation)
  • Max. Speed:
    5 mm/s ; 3 °/s (MMC-110)
  • Height:
    70 mm

X-BOT-120_Rendered_v1.0.jpg
X-BOT-120_v1_Datasheet_Drawing-2.jpg

Description


X-BOT-120 is a miniature “hexapod” with 70mm height for positioning and adjustment of precision components in 6 degrees of freedom with nm resolution. Using an innovative, proprietary arrangement of 6 nanopositioners, the X-BOT-120 achieves large motion ranges in an extremely compact form factor. An absolute encoder feedback option eliminates homing on power-up. An optional rotation stage (PR-32L) for 360° z-rotation can be integrated under the carrier platform. HV and UHV as well as non-magnetic versions are available. Custom travel ranges upon request.


Specifications


Travel Dependent
Tx, Ty Travel Range [mm] ± 6
Tz Travel Range [mm] +3.5/-6
Rx Travel Range [deg] +7/-9
Ry Travel Range [deg] ± 9
Rz Travel Range [deg] ± 6
Limit Switch None
Motor Compatibility
Motor Type Piezo Motor
Max. Speed 5 mm /s; 3°/s (MMC-110)
Motor/Feedback Dependent Specifications
Encoder Option Absolute Optical (BiSS C)
Resolution Tx, Ty, Tz [nm] 25
Resolution Rx, Ry, Rz [µdeg] 100
Repeatability Tx, Ty, Tz [nm] 100
Repeatability Rx, Ry, Rz [µdeg] 200
Repeatability, bi-directional (nm) ± 200
Repeatability, uni-directional (nm) 200
Load Characteristics
Orientation Fx (N) Fy (N) Fz (N) Mx (N·m) My (N·m) Mz (N·m)
Max. Load 2 2 5 - - -
Operating Conditions
Environmental Options Atmospheric High Vacuum 10-6 mbar Ultra High Vacuum 10-9 mbar Non-Magnetic

Downloads



CAD Files


Product Configurations
3D Preview
CAD
X-BOT-120-11500
Motor Type
Piezo Motor
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
Atmospheric
X-BOT-120-11506
Motor Type
Piezo Motor
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
X-BOT-120-11509
Motor Type
Piezo Motor
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
X-BOT-120-1150M
Motor Type
Piezo Motor
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
Non-Magnetic

Products Related To 6 Degree of Freedom Platform X-BOT-120


Piezo Rotation Stage PR-32L
Piezo motor Travel 360 degrees Resolution to 10 µdeg Load up to 1kg

Compact rotation stage with continuous, unlimited travel. Pre-loaded ball bearings ensure smooth motion and high stability.