X-BOT-120 is a miniature "hexapod" with 70mm height for positioning and adjustment of precision components in 6 degrees of freedom with nm resolution.
Using an innovative, proprietary arrangment of 6 nanopositioners, the X-BOT-120 achieves large motion ranges in an extremely compact form factor.
Absolute encoder feedback eliminates homing on power up, which is often not only time consuming, but also disruptive to precision applications.
An optional rotation stage (PR-32L) for 360 deg z-rotation can be integrated under the carrier platform.
HV and UHV as well as non-magnetic versions are available. Custom travel ranges upon request.
|Tx, Ty Travel Range [mm]||± 6|
|Tz Travel Range [mm]||+3.5/-6|
|Rx Travel Range [deg]||+7/-9|
|Ry Travel Range [deg]||± 9|
|Rz Travel Range [deg]||± 6|
|Motor Type||Piezo Motor|
|Max. Speed||5 mm /s; 3°/s (MMC-110)|
|Encoder Option||None (Open Loop)||Digital (RS-422)||Absolute Optical (BiSS C)|
|Resolution Tx, Ty, Tz [nm]||1||2||10|
|Resolution Rx, Ry, Rz [µdeg]||N/A||50||50|
|Repeatability Rx, Ry, Rz [µdeg]||N/A||50||50|
|Repeatability Tx, Ty, Tz [nm]||N/A||50||50|
|Environmental Options||Atmospheric||High Vacuum 10-6 mbar||High Vacuum 10-9 mbar|