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X-BOT-120

Product Highlights

  • Travel Range:
    ±6 XY, +3.5/-6 Z, +7°/-9° Rx, ±9° Ry, ±6° Rz
  • Resolution:
    10 nm / 1 µrad
  • Repeatability:
    ± 50 nm / ± 1 µrad
  • Payload:
    500 g (Vertical Orientation)
  • Max. Speed:
    5 mm/s ; 3 °/s (MMC-110)
  • Height:
    70 mm

X-BOT-120_Rendered_v1.0.jpg
X-BOT-120_v1_Datasheet_Drawing-2.jpg

Description


X-BOT-120 is a miniature "hexapod" with 70mm height for positioning and adjustment of precision components in 6 degrees of freedom with nm resolution.

Using an innovative, proprietary arrangment of 6 nanopositioners, the X-BOT-120 achieves large motion ranges in an extremely compact form factor. 

Absolute encoder feedback eliminates homing on power up, which is often not only time consuming, but also disruptive to precision applications.

An optional rotation stage (PR-32L) for 360 deg z-rotation can be integrated under the carrier platform.

HV and UHV as well as non-magnetic versions are available. Custom travel ranges upon request.

 


Specifications


Travel Dependent
Tx, Ty Travel Range [mm] ± 6
Tz Travel Range [mm] +3.5/-6
Rx Travel Range [deg] +7/-9
Ry Travel Range [deg] ± 9
Rz Travel Range [deg] ± 6
Limit Switch None
Motor Compatibility
Motor Type Piezo Motor
Max. Speed 5 mm /s; 3°/s (MMC-110)
Motor/Feedback Dependent Specifications
Encoder Option None (Open Loop) Digital (RS-422) Absolute Optical (BiSS C)
Resolution Tx, Ty, Tz [nm] 1 2 10
Resolution Rx, Ry, Rz [µdeg] N/A 50 50
Repeatability Rx, Ry, Rz [µdeg] N/A 50 50
Repeatability Tx, Ty, Tz [nm] N/A 50 50
Operating Conditions
Environmental Options Atmospheric High Vacuum 10-6 mbar High Vacuum 10-9 mbar

Downloads



CAD Files


Product Configurations
3D Preview
CAD
X-BOT-120-11000
Motor Type
Piezo Motor
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
X-BOT-120-11300
Motor Type
Piezo Motor
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
X-BOT-120-11500
Motor Type
Piezo Motor
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
Atmospheric
X-BOT-120-11006
Motor Type
Piezo Motor
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
X-BOT-120-11306
Motor Type
Piezo Motor
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
X-BOT-120-11506
Motor Type
Piezo Motor
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
X-BOT-120-11009
Motor Type
Piezo Motor
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-9 mbar
X-BOT-120-11309
Motor Type
Piezo Motor
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-9 mbar
X-BOT-120-11509
Motor Type
Piezo Motor
Encoder Option
Absolute Optical (BiSS C)
Limit Switch
None
Environmental Options
High Vacuum 10-9 mbar

Products Related To X-BOT-120


Piezo Rotation Stage PR-32L
Piezo motor Travel 360 degrees Resolution to 10 µdeg Load up to 1kg

Compact rotation stage with continuous, unlimited travel. Pre-loaded ball bearings ensure smooth motion and high stability