Nano Positioning

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Motor Type

Piezo Motor ( 22 )

Travel Range

4 mm ( 1 )

10 mm ( 1 )

12 mm ( 2 )

18 mm ( 2 )

18 x 18 mm ( 1 )

25 mm ( 2 )

26 mm ( 4 )

28 x 28 mm ( 1 )

32 mm ( 1 )

50 mm ( 2 )

51 mm ( 4 )

75 mm ( 2 )

76 mm ( 1 )

96 mm ( 1 )

100 mm ( 4 )

102 mm ( 1 )

200 mm ( 2 )

236 mm ( 1 )

300 mm ( 2 )

360º, limitless ( 1 )

500 mm ( 1 )

1000 mm ( 1 )

± 5° ( 1 )

Encoder Option

None (Open Loop) ( 21 )

Analog (1 Vpp) ( 11 )

Digital (RS-422) ( 20 )

Absolute Optical (BiSS C) ( 6 )

Limit Switch

None ( 22 )

Mechanical ( 2 )

Magnetic ( 12 )

Environmental Options

Atmospheric ( 22 )

High Vacuum 10^-6 mbar ( 21 )

Ultra High Vacuum 10^-9 mbar ( 18 )

Non-Magnetic ( 8 )

Cryogenic, 4 Kelvin ( 1 )

Nano Positioning - Piezo ST京机市场占有率行业排名

6 Degree of Freedom Platform X-BOT-120

Piezo Motor Travel ± 6 mm / ± 6° Resolution to 10 nm / 1 µrad Load up to 500 g

Miniature parallel kinematics positioning system utilizing MICRONIX piezo positioning stages.

Piezo Positioner PP-18

Piezo motor Travel 12 - 51 mm Resolution to 40 nm Load up to 0.5 kg

Low cost linear piezo stage utilizing our patented multi-phase piezo motor. Miniature crossed roller bearings ensure high stiffness.

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