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Precision Piezo Stage PPS-20

Product Highlights

  • Travel Range:
    12 mm - 51 mm
  • Encoder Resolution:
    2 nm
  • Repeatability, bi-directional:
    ± 50 nm
  • Repeatability, uni-directional:
    50 nm
  • Max. Speed:
    10 mm/s (MMC-110)
  • Max. Load:
    2 kg
  • Encoder Options:
    Analog or Digital
  • Height:
    13 mm
  • Bearing Type:
    Crossed Roller Bearing

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PPS-20 CLOSED LOOP.png
PPS-20PM Datasheet Drawing-9.jpg

Description


The PPS-20 is a high-precision, long travel linear piezo stage. Miniature crossed roller bearings assure high stiffness and guiding accuracy for loads up to 20 N (horizontal orientation). It utilizes our patented multi-phase piezo motor resulting in high speed (> 10 mm/s) and high blocking force (> 2 N). The PPS-20 is available in open loop or with an external encoder. Closed-loop encoder resolution of 2 nm is achievable. Versions capable of operation in vacuum (10-9 mbar), cryo (4 Kelvin), and non-magnetic materials are available. The PPS-20 is compatible with the MMC-100 and MMC-110 controllers.


Specifications


Travel Dependent
Travel Range 12 mm 18 mm 26 mm 51 mm
Straightness, Flatness (µm) ± 1 ± 1.5 ± 1.5 ± 2.5
Pitch (µrad) ± 60 ± 80 ± 80 ± 100
Yaw (µrad) ± 70 ± 90 ± 90 ± 100
Weight (g), Open Loop 22 28 36 70
Weight (g), Closed Loop 25 35 42 78
Limit Switch None, Magnetic
Motor Compatibility
Motor Type Piezo Motor
Max. Speed (mm/s) 2 (MMC-100), 10 (MMC-110)
Motor/Feedback Dependent Specifications
Encoder Option None (Open Loop) Analog (1 Vpp) Digital (RS-422)
Typical Resolution (nm) 1 10 2
Repeatability, bi-directional (nm) N/A ± 50 ± 50
Repeatability, uni-directional (nm) N/A 50 50
Load Characteristics
Orientation Fx (N) Fy (N) Fz (N) Mx (N·m) My (N·m) Mz (N·m)
Max. Load 2 20 20 0.7 0.7 0.7
Operating Conditions
Environmental Options Atmospheric High Vacuum 10-6 mbar Ultra High Vacuum 10-9 mbar Cryogenic, 4 Kelvin Non-Magnetic


CAD Files


Product Configurations
3D Preview
CAD
PPS-20-11000
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-20-11200
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Atmospheric
PPS-20-11300
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-20-11006
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-20-11206
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-20-11306
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-20-11009
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-20-11209
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-20-11309
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-20-1100C
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Cryogenic, 4 Kelvin
PPS-20-1120C
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Cryogenic, 4 Kelvin
PPS-20-1130C
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Cryogenic, 4 Kelvin
PPS-20-1100M
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-20-1120M
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-20-1130M
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-20-12000
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-20-12200
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Atmospheric
PPS-20-12300
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-20-12006
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-20-12206
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-20-12306
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-20-12009
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-20-12209
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-20-12309
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-20-1200C
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Cryogenic, 4 Kelvin
PPS-20-1220C
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Cryogenic, 4 Kelvin
PPS-20-1230C
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Cryogenic, 4 Kelvin
PPS-20-1200M
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-20-1220M
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-20-1230M
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-20-13000
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-20-13200
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Atmospheric
PPS-20-13300
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-20-13006
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-20-13206
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-20-13306
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-20-13009
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-20-13209
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-20-13309
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-20-1300C
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Cryogenic, 4 Kelvin
PPS-20-1320C
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Cryogenic, 4 Kelvin
PPS-20-1330C
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Cryogenic, 4 Kelvin
PPS-20-1300M
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-20-1320M
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-20-1330M
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-20-15000
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-20-15200
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Atmospheric
PPS-20-15300
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-20-15006
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-20-15206
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-20-15306
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-20-15009
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-20-15209
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-20-15309
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-20-1500C
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Cryogenic, 4 Kelvin
PPS-20-1520C
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Cryogenic, 4 Kelvin
PPS-20-1530C
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Cryogenic, 4 Kelvin
PPS-20-1500M
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-20-1520M
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-20-1530M
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-20-11010
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
Atmospheric
PPS-20-11016
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
High Vacuum 10-6 mbar
PPS-20-11019
Motor Type
Piezo Motor
Travel Range
12 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-20-12010
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
Atmospheric
PPS-20-12016
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
High Vacuum 10-6 mbar
PPS-20-12019
Motor Type
Piezo Motor
Travel Range
18 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-20-13010
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
Atmospheric
PPS-20-13016
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
High Vacuum 10-6 mbar
PPS-20-13019
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-20-15010
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
Atmospheric
PPS-20-15016
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
High Vacuum 10-6 mbar
PPS-20-15019
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
Ultra High Vacuum 10-9 mbar

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