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Precision Piezo Stage PPS-28

Product Highlights

  • Travel Range:
    26 mm - 102 mm
  • Encoder Resolution:
    2 nm
  • Repeatability, bi-directional:
    ± 50 nm
  • Repeatability, uni-directional:
    50 nm
  • Max. Speed:
    10 mm/s (MMC-110)
  • Max. Load:
    5 kg
  • Encoder Options:
    Analog or Digital
  • Height:
    15 mm
  • Bearing Type:
    Crossed Roller Bearing

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PPS 28 PM CLOSED LOOP.png
PPS-28PM_v2.7_Datasheet_Drawing-2.jpg

Description


The PPS-28 is a high-precision, long travel linear piezo stage. Miniature crossed roller bearings assure high stiffness and guiding accuracy for loads up to 50 N (horizontal orientation). It utilizes our patented multi-phase piezo motor resulting in high speed (> 10 mm/s) and high blocking force (> 2 N). The PPS-28 is available in open loop or with an external encoder. Closed-loop encoder resolution of 2 nm is achievable. Versions capable of operation in vacuum (10-9 mbar) are available. The PPS-28 is compatible with the MMC-100 and MMC-110 controllers.


Specifications


Travel Dependent
Travel Range 26 mm 51 mm 76 mm 102 mm
Straightness, Flatness (µm) ± 1.5 ± 2.5 ± 3 ± 3.5
Pitch (µrad) ± 50 ± 70 ± 80 ± 100
Yaw (µrad) ± 60 ± 75 ± 90 ± 100
Weight (g), Open Loop 70 140 170 240
Weight (g), Closed Loop 75 150 200 250
Limit Switch None, Magnetic
Motor Compatibility
Motor Type Piezo Motor
Max. Speed (mm/s) 2 (MMC-100), 10 (MMC-110)
Motor/Feedback Dependent Specifications
Encoder Option None (Open Loop) Analog (1 Vpp) Digital (RS-422)
Typical Resolution (nm) 1 10 2
Repeatability, bi-directional (nm) N/A ± 50 ± 50
Repeatability, uni-directional (nm) N/A 50 50
Load Characteristics
Orientation Fx (N) Fy (N) Fz (N) Mx (N·m) My (N·m) Mz (N·m)
Max. Load 2 50 50 1 1 1
Operating Conditions
Environmental Options Atmospheric High Vacuum 10-6 mbar Ultra High Vacuum 10-9 mbar Non-Magnetic


CAD Files


Product Configurations
3D Preview
CAD
PPS-28-11000
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-28-11200
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Atmospheric
PPS-28-11300
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-28-11006
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-28-11206
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-28-11306
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-28-11009
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-28-11209
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-28-11309
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-28-1100M
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-28-1120M
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-28-1130M
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-28-13000
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-28-13200
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Atmospheric
PPS-28-13300
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-28-13006
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-28-13206
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-28-13306
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-28-13009
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-28-13209
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-28-13309
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-28-1300M
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-28-1320M
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-28-1330M
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-28-14000
Motor Type
Piezo Motor
Travel Range
76 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-28-14200
Motor Type
Piezo Motor
Travel Range
76 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Atmospheric
PPS-28-14300
Motor Type
Piezo Motor
Travel Range
76 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-28-14006
Motor Type
Piezo Motor
Travel Range
76 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-28-14206
Motor Type
Piezo Motor
Travel Range
76 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-28-14306
Motor Type
Piezo Motor
Travel Range
76 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-28-14009
Motor Type
Piezo Motor
Travel Range
76 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-28-14209
Motor Type
Piezo Motor
Travel Range
76 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-28-14309
Motor Type
Piezo Motor
Travel Range
76 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-28-1400M
Motor Type
Piezo Motor
Travel Range
76 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-28-1420M
Motor Type
Piezo Motor
Travel Range
76 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-28-1430M
Motor Type
Piezo Motor
Travel Range
76 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-28-15000
Motor Type
Piezo Motor
Travel Range
102 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-28-15200
Motor Type
Piezo Motor
Travel Range
102 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Atmospheric
PPS-28-15300
Motor Type
Piezo Motor
Travel Range
102 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-28-15006
Motor Type
Piezo Motor
Travel Range
102 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-28-15206
Motor Type
Piezo Motor
Travel Range
102 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-28-15306
Motor Type
Piezo Motor
Travel Range
102 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 mbar
PPS-28-15009
Motor Type
Piezo Motor
Travel Range
102 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-28-15209
Motor Type
Piezo Motor
Travel Range
102 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-28-15309
Motor Type
Piezo Motor
Travel Range
102 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-28-1500M
Motor Type
Piezo Motor
Travel Range
102 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-28-1520M
Motor Type
Piezo Motor
Travel Range
102 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-28-1530M
Motor Type
Piezo Motor
Travel Range
102 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Non-Magnetic
PPS-28-11010
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
Atmospheric
PPS-28-11016
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
High Vacuum 10-6 mbar
PPS-28-11019
Motor Type
Piezo Motor
Travel Range
26 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-28-13010
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
Atmospheric
PPS-28-13016
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
High Vacuum 10-6 mbar
PPS-28-13019
Motor Type
Piezo Motor
Travel Range
51 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-28-14010
Motor Type
Piezo Motor
Travel Range
76 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
Atmospheric
PPS-28-14016
Motor Type
Piezo Motor
Travel Range
76 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
High Vacuum 10-6 mbar
PPS-28-14019
Motor Type
Piezo Motor
Travel Range
76 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
Ultra High Vacuum 10-9 mbar
PPS-28-15010
Motor Type
Piezo Motor
Travel Range
102 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
Atmospheric
PPS-28-15016
Motor Type
Piezo Motor
Travel Range
102 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
High Vacuum 10-6 mbar
PPS-28-15019
Motor Type
Piezo Motor
Travel Range
102 mm
Encoder Option
None (Open Loop)
Limit Switch
Magnetic
Environmental Options
Ultra High Vacuum 10-9 mbar

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