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Micro Precision Actuator, UHV MPA-20
Stepper motor Travel 12 mm Resolution to 0.1 µm Load up to 10 kg

Micronix MPA-20 is designed to operate in a limited space in an ultra-high vacuum environment.

Not recommended for new designs


Precision Positioning Stage PPS-20LM
Linear motor Travel 11 - 25 mm Resolution to 10 nm Load up to 2 N

Not recommended for new designs (use PPS-50)


Precision Positioning Stage PPS-28LM
Linear motor Travel 26 - 102 mm Resolution to 10 nm Load up to 1 kg

Not recommended for new designs (use PPS-50)


Precision Positioning Table MLS-38LM
Linear Motor 18mm Travel Resolution to 50nm 3N Force (Peek)

High speed, ultra-low profile positioning stage. Equiped with low maintenance recirculating ball bearings and linear motor for smooth travel. 


Precision Positioning Stage PPS-50LM
Linear Motor Travel 26 - 100mm High Speed (300mm/s) NanoDrive

Precision positioning stage with high speed and high stiffness with absolute encoder for increased resolution and repeatability.


Precision Positioning Stage PPS-60LM
Linear motor Travel 25 - 300 mm Resolution to 10 nm Load up to 5 kg

High precision, long travel linear positioing stage with ball bearings for smooth motion and high guiding accuracy.


Precision Positioning Stage PPS-70LM
Linear Motor Travel 32-100mm High Speed (300mm/s) Nanodrive

Precision positioning stage with high speed and high stiffness with absolute encoder for increaased resolution and repeatability.


Precision Positioning Stage PPS-110LM
Linear motor Travel 100 - 1000 mm Resolution to 10 nm Load up to 25 kg

High precision, long travel linear positioning stage with ball bearings for smooth motion and high guiding accuracy.


Precision Rotation Stage PR-70TM
Torque Motor Travel 360 degrees Resolution of 5 µdeg Load up to 3 kg

Compact rotation stage with continuous, unlimited travel and 1 in. aperture. Steel crossed roller bearings ensure smooth motion and high stability.