Elevation stage suitable for limited space. Pre-loaded ball slides ensure smooth motion and high stiffness.
High performance stackable piezo motor controller with speeds beyond 2 mm/s and resolutions down to 1 nm.
High performance integrated 3-axis controller, capable of driving 3 piezo motors up to 3 mm/s and resolution down to 1nm.
Not recommended for new designs
Stackable stepper motor controller with speeds beyond 10 mm/s and closed loop resolutions of 50nm.
Multi-phase piezo driver that accepts pulse-direction input, allowing speeds beyond 2 mm/s.
Multi-phase piezo driver that accepts pulse direction input and operates as a standalone 3-axis unit.
Not recommended for new designs
OEM plugin motion driver for multi-phase piezo motors.
Not recommended for new designs
Low cost, stackable modular motion driver with pulse direction input for stepper motors.
Designed for limited space applications for actuation of manual drive stages and mirror mounts.
Micronix MPA-20 is designed to operate in a limited space in an ultra-high vacuum environment.
Not recommended for new designs
Ultra-compact linear piezo stage. Low profile with high load capacity with multi-phase piezo motor. Special environment versions are available.
High precision, long travel piezo positioner. Available with optional encoder for increased resolution and repeatability.
Elevation stage suitable for limited space. Pre-loaded ball slides ensure smooth motion and high stiffness.
8 in. travel in X and Y axes, 0.5 in travel in Z-axis, 10° manual rotation and 3.5° manual tip-tilt for thermal chuck. 4 in. travel in Z-axis for probe.
Miniature parallel kinematics positioning system utilizing MICRONIX piezo positioning stages.
The PPS-series stages can be made for cryogenic temperatures down to 4K. Please contact us at (949) 480-0538 x701 for consultation on your specific application.
Our products can be manufactured to operate in a high vacuum environment, up to 10-6 mbar.
The PPS-series stages can be made to operate in a non-magnetic environment. Please contact us at (949) 480-0538 x701 for consultation on your specific application.
