Precision Piezo Positioner PPS-60

Product Highlights

  • Travel Range:
    25 mm - 300 mm (Longer travel available on request)
  • Encoder Resolution:
    2 nm (Closed Loop)
  • Repeatability, bi-directional:
    ± 100 nm
  • Repeatability, uni-directional:
    100 nm
  • Max. Speed:
    5 mm/s
  • Max. Load:
    15 kg
  • Encoder Options:
    Analog or Digital
  • Bearing Type:
    Ball Bearings

zoom_PPS-60_SM-2.jpg

Description


The PPS-60 is a high-precision, long travel linear stage. The same stage is available with piezo motor, linear motor or stepper motor drive. Ball bearings assure high stiffness and guiding accuracy for loads up to 150 N. The PPS-60 is available with an optional linear encoder for increased resolution and repeatability. PPS-60 stages can be mounted in XY without any adapter, and a Z-axis can be added with the use of a standard mounting bracket.


Specifications


Travel Dependent
Travel Range 25 mm 50 mm 100 mm 200 mm 300 mm
Straightness, Flatness (µm) ± 2.5 ± 4.0 ± 6.0 ± 8.0 ± 10.0
Pitch (µrad) ± 50 ± 75 ± 100 ± 125 ± 150
Yaw (µrad) ± 50 ± 75 ± 100 ± 125 ± 150
Limit Switch None, Mechanical
Motor Compatibility
Motor Type Piezo Motor
Max. Speed (mm/s) 5 (MMC-110)
Motor/Feedback Dependent Specifications
Encoder Option None (Open Loop) Analog (1 Vpp) Digital (RS-422) Digital Low Cost (0.5 µm)
Typical Resolution (nm) 1 10 2 500
Repeatability, bi-directional (nm) N/A ± 500 ± 100 ± 1000
Repeatability, uni-directional (nm) N/A 500 100 1000
Load Characteristics
Orientation Fx (N) Fy (N) Fz (N) Mx (N·m) My (N·m) Mz (N·m) kax (µrad/N·m) kay (µrad/N·m)
Max. Load 5 100 150 10 10 10 100 100
Operating Conditions
Environmental Options Atmospheric High Vacuum 10-6 bar High Vacuum 10-9 bar


CAD Files


Product Configurations
3D Preview
CAD
PPS-60-11000
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-60-11006
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
PPS-60-11009
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar
PPS-60-11010
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
Atmospheric
PPS-60-11016
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 bar
PPS-60-11019
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-9 bar
PPS-60-11200
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Atmospheric
PPS-60-11206
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
PPS-60-11209
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar
PPS-60-11210
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
Mechanical
Environmental Options
Atmospheric
PPS-60-11216
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 bar
PPS-60-11219
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-9 bar
PPS-60-11300
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-60-11306
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
PPS-60-11309
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar
PPS-60-11310
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Digital (RS-422)
Limit Switch
Mechanical
Environmental Options
Atmospheric
PPS-60-11316
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Digital (RS-422)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 bar
PPS-60-11319
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Digital (RS-422)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-9 bar
PPS-60-11400
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Digital Low Cost (0.5 µm)
Limit Switch
None
Environmental Options
Atmospheric
PPS-60-11406
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Digital Low Cost (0.5 µm)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
PPS-60-11409
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Digital Low Cost (0.5 µm)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar
PPS-60-11410
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Digital Low Cost (0.5 µm)
Limit Switch
Mechanical
Environmental Options
Atmospheric
PPS-60-11416
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Digital Low Cost (0.5 µm)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 bar
PPS-60-11419
Motor Type
Piezo Motor
Travel Range
25 mm
Encoder Option
Digital Low Cost (0.5 µm)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-9 bar
PPS-60-12000
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-60-12006
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
PPS-60-12009
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar
PPS-60-12010
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
Atmospheric
PPS-60-12016
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 bar
PPS-60-12019
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-9 bar
PPS-60-12206
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
PPS-60-12209
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar
PPS-60-12210
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
Mechanical
Environmental Options
Atmospheric
PPS-60-12216
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 bar
PPS-60-12219
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-9 bar
PPS-60-12300
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-60-12306
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
PPS-60-12309
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar
PPS-60-12310
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Digital (RS-422)
Limit Switch
Mechanical
Environmental Options
Atmospheric
PPS-60-12316
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Digital (RS-422)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 bar
PPS-60-12319
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Digital (RS-422)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-9 bar
PPS-60-12400
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Digital Low Cost (0.5 µm)
Limit Switch
None
Environmental Options
Atmospheric
PPS-60-12406
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Digital Low Cost (0.5 µm)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
PPS-60-12409
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Digital Low Cost (0.5 µm)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar
PPS-60-12410
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Digital Low Cost (0.5 µm)
Limit Switch
Mechanical
Environmental Options
Atmospheric
PPS-60-12416
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Digital Low Cost (0.5 µm)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 bar
PPS-60-12419
Motor Type
Piezo Motor
Travel Range
50 mm
Encoder Option
Digital Low Cost (0.5 µm)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-9 bar
PPS-60-13000
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
Atmospheric
PPS-60-13006
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
PPS-60-13009
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
None (Open Loop)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar
PPS-60-13010
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
Atmospheric
PPS-60-13016
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 bar
PPS-60-13019
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
None (Open Loop)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-9 bar
PPS-60-13200
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
Atmospheric
PPS-60-13206
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
PPS-60-13209
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar
PPS-60-13210
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
Mechanical
Environmental Options
Atmospheric
PPS-60-13216
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 bar
PPS-60-13219
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Analog (1 Vpp)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-9 bar
PPS-60-13300
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
Atmospheric
PPS-60-13306
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
PPS-60-13309
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Digital (RS-422)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar
PPS-60-13310
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Digital (RS-422)
Limit Switch
Mechanical
Environmental Options
Atmospheric
PPS-60-13316
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Digital (RS-422)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-6 bar
PPS-60-13319
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Digital (RS-422)
Limit Switch
Mechanical
Environmental Options
High Vacuum 10-9 bar
PPS-60-13400
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Digital Low Cost (0.5 µm)
Limit Switch
None
Environmental Options
Atmospheric
PPS-60-13406
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Digital Low Cost (0.5 µm)
Limit Switch
None
Environmental Options
High Vacuum 10-6 bar
PPS-60-13409
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Digital Low Cost (0.5 µm)
Limit Switch
None
Environmental Options
High Vacuum 10-9 bar
PPS-60-13410
PPS-60-13416
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Digital Low Cost (0.5 µm)
Environmental Options
High Vacuum 10-6 bar
PPS-60-13419
Motor Type
Piezo Motor
Travel Range
100 mm
Encoder Option
Digital Low Cost (0.5 µm)
Environmental Options
High Vacuum 10-9 bar
PPS-60-14000
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
None (Open Loop)
Environmental Options
Atmospheric
PPS-60-14006
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
None (Open Loop)
Environmental Options
High Vacuum 10-6 bar
PPS-60-14009
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
None (Open Loop)
Environmental Options
High Vacuum 10-9 bar
PPS-60-14010
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
None (Open Loop)
Environmental Options
Atmospheric
PPS-60-14016
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
None (Open Loop)
Environmental Options
High Vacuum 10-6 bar
PPS-60-14019
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
None (Open Loop)
Environmental Options
High Vacuum 10-9 bar
PPS-60-14200
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Analog (1 Vpp)
Environmental Options
Atmospheric
PPS-60-14206
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Analog (1 Vpp)
Environmental Options
High Vacuum 10-6 bar
PPS-60-14209
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Analog (1 Vpp)
Environmental Options
High Vacuum 10-9 bar
PPS-60-14210
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Analog (1 Vpp)
Environmental Options
Atmospheric
PPS-60-14216
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Analog (1 Vpp)
Environmental Options
High Vacuum 10-6 bar
PPS-60-14219
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Analog (1 Vpp)
Environmental Options
High Vacuum 10-9 bar
PPS-60-14300
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Digital (RS-422)
Environmental Options
Atmospheric
PPS-60-14306
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Digital (RS-422)
Environmental Options
High Vacuum 10-6 bar
PPS-60-14309
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Digital (RS-422)
Environmental Options
High Vacuum 10-9 bar
PPS-60-14310
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Digital (RS-422)
Environmental Options
Atmospheric
PPS-60-14316
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Digital (RS-422)
Environmental Options
High Vacuum 10-6 bar
PPS-60-14319
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Digital (RS-422)
Environmental Options
High Vacuum 10-9 bar
PPS-60-14400
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Digital Low Cost (0.5 µm)
Environmental Options
Atmospheric
PPS-60-14406
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Digital Low Cost (0.5 µm)
Environmental Options
High Vacuum 10-6 bar
PPS-60-14409
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Digital Low Cost (0.5 µm)
Environmental Options
High Vacuum 10-9 bar
PPS-60-14410
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Digital Low Cost (0.5 µm)
Environmental Options
Atmospheric
PPS-60-14416
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Digital Low Cost (0.5 µm)
Environmental Options
High Vacuum 10-6 bar
PPS-60-14419
Motor Type
Piezo Motor
Travel Range
200 mm
Encoder Option
Digital Low Cost (0.5 µm)
Environmental Options
High Vacuum 10-9 bar
PPS-60-15000
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
None (Open Loop)
Environmental Options
Atmospheric
PPS-60-15006
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
None (Open Loop)
Environmental Options
High Vacuum 10-6 bar
PPS-60-15009
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
None (Open Loop)
Environmental Options
High Vacuum 10-9 bar
PPS-60-15010
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
None (Open Loop)
Environmental Options
Atmospheric
PPS-60-15016
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
None (Open Loop)
Environmental Options
High Vacuum 10-6 bar
PPS-60-15019
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
None (Open Loop)
Environmental Options
High Vacuum 10-9 bar
PPS-60-15200
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Analog (1 Vpp)
Environmental Options
Atmospheric
PPS-60-15206
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Analog (1 Vpp)
Environmental Options
High Vacuum 10-6 bar
PPS-60-15209
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Analog (1 Vpp)
Environmental Options
High Vacuum 10-9 bar
PPS-60-15210
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Analog (1 Vpp)
Environmental Options
Atmospheric
PPS-60-15216
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Analog (1 Vpp)
Environmental Options
High Vacuum 10-6 bar
PPS-60-15219
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Analog (1 Vpp)
Environmental Options
High Vacuum 10-9 bar
PPS-60-15300
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Digital (RS-422)
Environmental Options
Atmospheric
PPS-60-15306
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Digital (RS-422)
Environmental Options
High Vacuum 10-6 bar
PPS-60-15309
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Digital (RS-422)
Environmental Options
High Vacuum 10-9 bar
PPS-60-15310
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Digital (RS-422)
Environmental Options
Atmospheric
PPS-60-15316
Drawing
 
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Digital (RS-422)
Environmental Options
High Vacuum 10-6 bar
PPS-60-15319
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Digital (RS-422)
Environmental Options
High Vacuum 10-9 bar
PPS-60-15400
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Digital Low Cost (0.5 µm)
Environmental Options
Atmospheric
PPS-60-15406
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Digital Low Cost (0.5 µm)
Environmental Options
High Vacuum 10-6 bar
PPS-60-15409
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Digital Low Cost (0.5 µm)
Environmental Options
High Vacuum 10-9 bar
PPS-60-15410
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Digital Low Cost (0.5 µm)
Environmental Options
Atmospheric
PPS-60-15416
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Digital Low Cost (0.5 µm)
Environmental Options
High Vacuum 10-6 bar
PPS-60-15419
Motor Type
Piezo Motor
Travel Range
300 mm
Encoder Option
Digital Low Cost (0.5 µm)
Environmental Options
High Vacuum 10-9 bar

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