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Micro Precision Actuator, UHV MPA-20
Stepper motor Travel 12 mm Resolution to 0.1 µm Load up to 10 kg

Micronix MPA-20 is designed to operate in a limited space in an ultra-high vacuum environment.

Not recommended for new designs


Precision Positioning Stage PPS-20LM
Linear motor Travel 11 - 25 mm Resolution to 10 nm Load up to 2 N

Not recommended for new designs (use PPS-50)


Precision Positioning Stage PPS-28LM
Linear motor Travel 26 - 102 mm Resolution to 10 nm Load up to 1 kg

Not recommended for new designs (use PPS-50)


Precision Positioning Table MLS-38LM
Linear Motor 18mm Travel Resolution to 50nm 3N Force (Peek)

High speed, ultra-low profile positioning stage. Equiped with low maintenance recirculating ball bearings and linear motor for smooth travel. 


Precision Positioning Stage PPS-50LM
Linear Motor Travel 26 - 100mm High Speed (300mm/s) NanoDrive

Precision positioning stage with high speed and high stiffness with absolute encoder for increased resolution and repeatability.


Precision Positioning Stage PPS-60LM
Linear motor Travel 25 - 300 mm Resolution to 10 nm Load up to 5 kg

High precision, long travel linear positioing stage with ball bearings for smooth motion and high guiding accuracy.


Precision Positioning Stage PPS-70LM
Linear Motor Travel 32-100mm High Speed (300mm/s) Nanodrive

Precision positioning stage with high speed and high stiffness with absolute encoder for increaased resolution and repeatability.


Precision Positioning Stage PPS-110LM
Linear motor Travel 100 - 1000 mm Resolution to 10 nm Load up to 25 kg

High precision, long travel linear positioning stage with ball bearings for smooth motion and high guiding accuracy.


Precision Rotation Stage PR-70TM
Torque Motor Travel 360 degrees Resolution of 5 µdeg Load up to 3 kg

Compact rotation stage with continuous, unlimited travel and 1 in. aperture. Steel crossed roller bearings ensure smooth motion and high stability.


Modular Motion Controller MMC-10
Piezo Motor Controller 1 axis Speed > 2 mm/s USB and RS-485

High performance with speeds beyond > 2 mm/s with our patented multi-phase piezo motor.

Not recommended for new designs


Modular Motion Controller MMC-100
Piezo Motor Controller Stackable to 16 axis Speed > 2 mm/s USB and RS-485

High performance stackable piezo motor controller with speeds beyond 2 mm/s and resolutions down to 1 nm.


Modular Motion Controller MMC-110
Piezo Motor Controller Stackable up to 16 axis Speed > 10 mm/s USB and RS-232

High performance controller with speeds beyond 10 mm/s with our patented multi-phase piezo motor.


Modular Motion Driver MMD-100
Piezo Motor Controller Stackable to 16 axis Speed > 2 mm/s USB and RS-485

Multi-phase piezo driver that accepts pulse-direction input, allowing speeds beyond 2 mm/s.


Modular Motion Controller MMC-200
Stepper Motor Controller Stackable to 16 axis Speed 10 mm/s USB and RS-485

Stackable stepper motor controller with speeds beyond 10 mm/s and closed loop resolutions of 50nm.


Modular Motion Driver MMD-200
Stepper Motor Controller Stackable to 16 axes Speed > 2 mm/s USB and RS-485

Low cost, stackable modular motion driver with pulse direction input for stepper motors.


MMC-Ethernet
Communication Ethernet TCP/IP

PoE+ compatible powered device that provides Ethernet TCP/IP communication to all standard MMC controllers. 


NanoDrive
Piezo Motor Controller Stepper Motor Controller Linear Motor Controller Stackable to 6 axis USB Type C (PD) 6 Pin Harwin Gecko

Ultra-compact motion controller compatible with all Micronix piezo motors, stepper motors, BLDC motors and DC motors.


Ethernet Communication NanoDrive-EXP
Communication Ethernet TCP/IP

Expansion module that provides Ethernet TCP/IP communication and additional analog and digital I/O to NanoDrive Motion Controllers.


MMX-RACK
Piezo Motor Controller Stepper Motor Controller Linear Motor Controller Up to 24 axis

Micronix MMX-RACK-1 is a high-density motion controller platform capable of controlling up to 24 axes in a single, scalable system.


MMX-120 Controller Card
Piezo Motor Controller

The MMX-120 is a high-performance single-axis piezo motion control card for piezo-driven actuators and sub-nanometer positioning resolution (stage dependent) with Micronix’s patented multi-phase piezo motor technology.